Fundamentals of Micro- and Nanotechnology

Major: Telecommunications and Radio Engineering
Code of subject: 6.172.05.E.121
Credits: 5.00
Department: Electronics and Information Technology
Lecturer: Professor Dmytro Zayachuk
Semester: 8 семестр
Mode of study: денна
Learning outcomes: 1. Knowledge and understanding of scientific principles and laws on which modern micro- and nanotechnologies of manufacturing structures, devices, devices and systems of telecommunications and radio engineering are based. 2. The ability to use in practice the acquired knowledge of the technology of forming two-dimensional, one-dimensional, zero-dimensional semiconductor structures to meet the needs of modern radio electronics and information systems. 3. The ability to use scientific literature, which is devoted to the problems of the educational discipline. 4. The ability to independently analyze the results of the latest developments and achievements in the field of nanostructure manufacturing technology. 5. The ability to independently draw conclusions.
Required prior and related subjects: Previous academic disciplines Physics, Higher Mathematics Associated and subsequent academic disciplines Structural design of radio electronic devices Basics of materials science
Summary of the subject: The basics of modern technologies for growing device structures of semiconductor micro- and nanoelectronics are explained: vacuum deposition of thin films; epitaxy of thin films from the gas phase; molecular beam epitaxy; gas-phase epitaxy from organometallic compounds and hydrides; liquid phase epitaxy; technological methods of forming arrays of quantum threads and quantum dots. The latest developments and achievements in the field of micro- and nanotechnologies are analyzed.
Assessment methods and criteria: Presentations at practical classes, test control works in the National Emergency Service, examination control.
Recommended books: 1. Заячук Д.М., Нанотехнології і наноструктури, Львів, 2009. 2. Технология тонких пленок. Под ред. Л. Майссела и Р. Глэнга. Т. 1 и 2., М.: Советское радио, 1977. 3. Молекулярно-лучевая эпитаксия и гетероструктуры. Под ред. Л. Ченга и К. Плога, М.: Мир, 1989. 4. Физико-химические основы жидкофазной эпитаксии. Уфимцев В.Б., Акчурин Р.Х. М.: Металлургия, 1983.