Integrated Circuit Technology

Major: Micro and Nanosystem Technology
Code of subject: 6.153.03.M.72
Credits: 6.00
Department: Semiconductor Electronics
Lecturer: Dr. Sci., Prof. Khoverko Yuriy
Semester: 7 семестр
Mode of study: денна
Learning outcomes: As a result of the discipline learning the student has to: • know the basic types of structures of integrated circuits and their manufacturing processes, physical processes and principles of technical features and capabilities of their implementation; • be able to use in practice acquired knowledge of manufacturing technology of integrated circuits, analyze the physical and chemical processes that occur in the manufacture of integrated circuits, select the material for and justify the physical structure of integrated circuits, improve processes manufacturing integrated circuits and modify them depending on the requirements to finished chip.
Required prior and related subjects: prerequisites: Solid-state electronics, Physics of semiconductors and dielectrics, Technological fundamentals of micro- and nanosystem technology co-requisites: Circuit Engineering
Summary of the subject: General principles and approaches to problems of manufacturing technology of integrated circuits. Technology of bipolar transistors and bipolar ICs. Technology of ICs for FET. Semiconductor materials for integrated circuits. Technology production and processing of substrates for integrated circuits. Thermal oxidation of silicon. Lithography technology in the manufacture of integrated circuits. Diffusion technology manufacturing integrated circuits. Ion implantation technology manufacturing integrated circuits. Epitaxy processes in the manufacturing technology of integrated circuits. Deposition of polycrystalline silicon. Metallization in technology of integrated circuits. Making connections and contacts. Methods of assembly and sealing of integrated circuits
Assessment methods and criteria: • Current checkups 30% – checkups on the practical classes, tests and individual tasks • Final test 70% – Exam (written answers and oral examination)
Recommended books: Khoverko Yu.M. ZIS technology: electronic educational and methodological complex. – registration number No. E41-124-39/2016. – hosting address: https://vns.lpnu.ua/course/view.php?id=1116 Khoverko Y.M., Ostrovsky I.P., Druzhynin A.O. Technology of elements of integrated circuits of micro and nanosystem technology. Education manual. - Lviv: Publishing House of the National University "Lviv Polytechnic", 2018. - 172 p Novosydluj S. Micro and nanoelectronic VLSI .MSEU.-2010 (in Ukrainian) Broydaj I., Merrej J. Physical basis of microtechnology. M.: 1985.